Structure Fabrication of PI Film for GEM Detector

YI Fu-Ting; LUO Liang; ZHANG Ju-Fang; CHEN Yuan-Bai; XIE Yi-Gang; XIE Wan

Chinese Physics C> 2007, Vol. 31> Issue(10) : 929-932

Structure Fabrication of PI Film for GEM Detector

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China2 Graduate University of Chinese Academy of Sciences, Beijing 100049, China

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Abstract：
GEM, which has rapidly been developed in recent years as a new type of gas detector, has advantages of high position resolution and counting rate with a wide potential application in particle physics and X-ray imaging and etc. One of the key techniques of GEM's development is the structure fabrication of the PI film for the detector, which is difficult to be done by the lithography process. In this paper we present the structure fabrication process of GEM's PI film, and the result of our work about it. We chose wet-etching and dry-etching to make the structure holes of PI film, and find that wet-etching is better way to get perfect holes of GEM's PI film for future application with acceptable price. The successful fabrication of GEM's film structures is helpful to develop the domestic research of GEM detector. The performance of the GEM detector with such PI film still need more detail study.

References

[1]

. Sauli F. A New Concept for Electron Ampli cation in GasDetectors. Nuclear Instrument and Methods, 1997, A386:531-5342. LAI Yong-Fang, LI Yu-Lan, LI Yuan-Jing et al. HEP NP, 2006, 30(8): 767-770(in Chinese)(来永芳，李玉兰，李元景等.高能物理与核物理，2006, 30(8):767-770)3. AN Shao-Hui, LI Cheng, XU Zi-Zhong et al. HEP NP,2004, 28(4): 412-416(in Chinese)(安少辉，李澄，许咨宗等.高能物理与核物理，2004, 28(4):412-416)4. Mormann D et al. GEM-based Gaseous Photonmultipliersfor UV and Visible Photon Imaging. Nuclear Instrumentand Methods, 2003, A504: 93-985. Vitor da Silva, Rui de Oliveira, David Watts et al. AnInnovative \ChemicalVia" Process for the Production ofHigh Density Interconnect Printed Circuit Boards, CircuitWorld., 2004, 30/4: 27-336. LI Cheng, SUN Yong-Jie, ZHOU Yi et al. HEP NP, 2005,29(1): 68-71(in Chinese) (李澄，孙勇杰，周意等.高能物理与核物理，2005, 29(1): 68-71)7. HAN Ji-Song et al. Three-dimensional Interconnect Technology on a Flexible Polyimide Film, J. Micromech. Microeng., 2004, 14: 38-48

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YI Fu-Ting, LUO Liang, ZHANG Ju-Fang, CHEN Yuan-Bai, XIE Yi-Gang and XIE Wan. Structure Fabrication of PI Film for GEM Detector[J]. Chinese Physics C, 2007, 31(10): 929-932.

YI Fu-Ting, LUO Liang, ZHANG Ju-Fang, CHEN Yuan-Bai, XIE Yi-Gang and XIE Wan. Structure Fabrication of PI Film for GEM Detector[J]. Chinese Physics C, 2007, 31(10): 929-932. shu

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Received: 2006-12-03
Revised: 2006-12-19

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沈阳化工大学材料科学与工程学院沈阳 110142

Structure Fabrication of PI Film for GEM Detector

Corresponding author: LUO Liang,

Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China2 Graduate University of Chinese Academy of Sciences, Beijing 100049, China

Received Date: 2006-12-03
Accepted Date: 2006-12-19
Available Online: 2007-10-05

Abstract: GEM, which has rapidly been developed in recent years as a new type of gas detector, has advantages of high position resolution and counting rate with a wide potential application in particle physics and X-ray imaging and etc. One of the key techniques of GEM's development is the structure fabrication of the PI film for the detector, which is difficult to be done by the lithography process. In this paper we present the structure fabrication process of GEM's PI film, and the result of our work about it. We chose wet-etching and dry-etching to make the structure holes of PI film, and find that wet-etching is better way to get perfect holes of GEM's PI film for future application with acceptable price. The successful fabrication of GEM's film structures is helpful to develop the domestic research of GEM detector. The performance of the GEM detector with such PI film still need more detail study.