Bias Dependence of Total Dose Effect of Partially Depleted SOI MOSFET

  • Experiments show that total dose radiation effect in buried oxide of SOI (Silicon on Insulator) MOS is obviously dependent on bias condition. Trapped charge buildup during irradiation in buried oxide, which dominantly induces back channel leakage, is investigated. A numerical model, including process of carrier recombination and trapping, is developed to simulate the trapped charge buildup in buried oxide under different bias conditions. The simulation results, agreed with the experiment results, show the mechanism of bias dependence of total dose radiation effect.
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YU Wen-Jie, WANG Ru, ZHANG Zheng-Xuan, QIAN Cong, HE Wei, TIAN Hao and CHEN Ming. Bias Dependence of Total Dose Effect of Partially Depleted SOI MOSFET[J]. Chinese Physics C, 2007, 31(9): 819-822.
YU Wen-Jie, WANG Ru, ZHANG Zheng-Xuan, QIAN Cong, HE Wei, TIAN Hao and CHEN Ming. Bias Dependence of Total Dose Effect of Partially Depleted SOI MOSFET[J]. Chinese Physics C, 2007, 31(9): 819-822. shu
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Received: 2006-11-25
Revised: 2007-01-03
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Bias Dependence of Total Dose Effect of Partially Depleted SOI MOSFET

    Corresponding author: YU Wen-Jie,
  • Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

Abstract: Experiments show that total dose radiation effect in buried oxide of SOI (Silicon on Insulator) MOS is obviously dependent on bias condition. Trapped charge buildup during irradiation in buried oxide, which dominantly induces back channel leakage, is investigated. A numerical model, including process of carrier recombination and trapping, is developed to simulate the trapped charge buildup in buried oxide under different bias conditions. The simulation results, agreed with the experiment results, show the mechanism of bias dependence of total dose radiation effect.

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