Study of Multilayer Structures by Synchrotron Radiation with Small Angle Diffraction Method

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Wang Jun, Cui Mingqi, Xu Wenxuan, Huang Yuying, Wang Dewu, Liu Jianfei and Xian Dingchang. Study of Multilayer Structures by Synchrotron Radiation with Small Angle Diffraction Method[J]. Chinese Physics C, 1993, 17(S4): 311-319.
Wang Jun, Cui Mingqi, Xu Wenxuan, Huang Yuying, Wang Dewu, Liu Jianfei and Xian Dingchang. Study of Multilayer Structures by Synchrotron Radiation with Small Angle Diffraction Method[J]. Chinese Physics C, 1993, 17(S4): 311-319. shu
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Received: 1992-10-30
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Study of Multilayer Structures by Synchrotron Radiation with Small Angle Diffraction Method

  • Institute of High Energy Physics, Chinese Academy of Sciences, Beijing, China

Abstract: Small angle diffraction on W/Si multilayer fabricated by magnetron sputtering is carried out at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). We present the analysis on the periodicity of the multilayer, the thickness of one period and the combination and give a comparison with the fitting result.

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