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Abstract:
Amorphous alloy (Co94Fe4Cr2)78Si8B14 was bombarded with argon ions at energies of 150keV and 195keV respectively. Above a critical fluence blistering and sputtering erosion were the two main surface damage phenomena. The critical fluence for onset of pinhole formation was determined and found to increase with ion energy. The density of pinhole increases with ion fluence dramatically and at a certain fluence, it reaches saturation. However, with the formation of pinhole, the density of blister decreases rapidly and a kind of porous structure is developed at a certain fluence.These results were interpreted with sputtering and rupture of bubbles.
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