Simulation of ion beam extraction and focusing system

B. A. Soliman<SUP></SUP>; M. M. Abdelrahman; A. G. Helal; F. W. Abdelsalam

doi:10.1088/1674-1137/35/1/017

Chinese Physics C> 2011, Vol. 35> Issue(1) : 83-87 DOI: 10.1088/1674-1137/35/1/017

Simulation of ion beam extraction and focusing system

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The characteristics of ion beam extraction and focused to a volume as small as possible were investigated with the aid of computer code SIMION 3D version 7. This has been used to evaluate the extraction characteristics (accel-decel system) to generate an ion beam with low beam emittance and high brightness. The simulation process can provide a good study for optimizing the extraction and focusing system of the ion beam without any losses and transported to the required target. Also, a study of a simulation model for the extraction system of the ion source was used to describe the possible plasma boundary curvatures during the ion extraction that may be affected by the change in an extraction potential with a constant plasma density meniscus.

References

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Omer Sise et al. Journal of Electron Spectroscopy and Related Phenomena, 2009 175: 762 Hanke K, Heising S, Probert G, Scrivens R. Intern. Conf. on Ion Sources (ICIS). Oakland, CA, USA: 2001, 3-73 Dahl D A. SIMION 3 D Version 7.0 User's Manual INEEL - 95/0403. Idaho National Engineering and Environmental Laboratory, I D 2000, 834154 Dahl D A, Delmore J E, Appelhans A D. Rev. Sci. Instrum, 1990 61: 6075 Wilson R G, Brewer G R. Ion Beams with Applications to Ion Implantation. New York: John Wiley, 19736 Brown I G. The Physics and Technology of Ion Sources. New York: John Wiley, 20047 Green T S. IEEE, Nucl. Sci. NS, 1976, 23: 9188 Wilson R G, Brewer G R. Ion Beams with Applications to Ion Implantation. John WileyNew York: 19739 Wituschek H et al. Rev. Sci. Instrum, 1992, 63: 2785

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B. A. Soliman, M. M. Abdelrahman, A. G. Helal and F. W. Abdelsalam. Simulation of ion beam extraction and focusing system[J]. Chinese Physics C, 2011, 35(1): 83-87. doi: 10.1088/1674-1137/35/1/017

B. A. Soliman, M. M. Abdelrahman, A. G. Helal and F. W. Abdelsalam. Simulation of ion beam extraction and focusing system[J]. Chinese Physics C, 2011, 35(1): 83-87. doi: 10.1088/1674-1137/35/1/017 shu

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Received: 2010-03-29
Revised: 2010-05-20

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沈阳化工大学材料科学与工程学院沈阳 110142

Simulation of ion beam extraction and focusing system

Received Date: 2010-03-29
Accepted Date: 2010-05-20
Available Online: 2011-01-05

Abstract: The characteristics of ion beam extraction and focused to a volume as small as possible were investigated with the aid of computer code SIMION 3D version 7. This has been used to evaluate the extraction characteristics (accel-decel system) to generate an ion beam with low beam emittance and high brightness. The simulation process can provide a good study for optimizing the extraction and focusing system of the ion beam without any losses and transported to the required target. Also, a study of a simulation model for the extraction system of the ion source was used to describe the possible plasma boundary curvatures during the ion extraction that may be affected by the change in an extraction potential with a constant plasma density meniscus.