Thickness Analysis for Thin-Film by Glazing Exit X-ray Fluorescence With Synchrotron Radiation Source

GONG Yan; CHEN Bo; NI Qi-Liang; CUI Ming-Qi; ZHAO Yi-Dong; WU Zhong-Hua

Chinese Physics C> 2005, Vol. 29> Issue(11) : 1104-1106

Thickness Analysis for Thin-Film by Glazing Exit X-ray Fluorescence With Synchrotron Radiation Source

State Key Lab of Applied Optics,the Institute of Optics,Fine Mechanics and Physics,CAS,Changchun 130033,China2 Institute of High Energy Physics,CAS,Beijing 100049,China

Abstract
HTML
Reference
Related

PDF

Abstract：
The grazing exit X-ray fluorescence provides a possibility to analyze the characteristics of thin film and multilayer, especially the thickness, interface structure and composition.The Cr film samples with different thickness deposited on silicon (Si) bases are tested with grazing method using Beijing synchrotron radiation source (SR) as excitation light.The results agree with the theoretical prediction, and the interference of emitted X-ray has been observed.

References

[1]

. De Boer D K G, Leenaers A J G, Van den Hoogenhof WW. X-ray Spectrometry, 1995, 24: 91-1022. GONG Yan, CHEN Bo, NI Qi-Liang et al. Physics, 2002,31(3): 167-170(in Chinese)(巩岩，陈波，尼启良等.物理，2002, 31(3): 167-170)3. Kouichi Tsuji, Zoya Spolnik, Kazuaki Wagatshma et al.Analytical Sciences, 2001, 17: 145-1484. Sqato S, Tsuji K, Hirokawa K. E. Appl. Phys. A, 1996, 62:87-935. de Bokx P K, Chr. Kok, Bailleul A et al. SpectrochimicaACTA, 1997, B52: 829-8406. Per Skytt, Bjorn Galnander, Tomas Nygerg et al. Nu-clear Instruments and Methods in Physics Research, 1997,A384: 558-5627. LI Xue-Jun, CHAO Zhi-Yu, XIAN Ding-Chang. Physics,1993, 22(9): 553-558(in Chinese)(李学军，巢志瑜，冼鼎昌.物理，1993, 22(9): 553-558)8. Born M, Woif E. Principle of Optics. Beijing: SciencesPress, 1978(in Chinese)(M.玻恩，E.沃尔夫.光学原理.北京:科学出版社，1978)

[1]	SUN Li-Juan , CUI Ming-Qi , ZHU Jie , ZHAO Yi-Dong , ZHENG Lei , MA Chen-Yan , CHEN Kai , ZHAO Jia , ZHOU Ke-Jin , WANG Zhan-Shan , WANG Hong-Chang . Polarization Characteristic Measurements of the Synchrotron Radiation Beamline Based on Multilayer. Chinese Physics C, 2007, 31(4): 400-404.
[2]	FENG Liu-Xing , XIAO Hai-Qing , HE Xiao , ZHANG Zhi-Yong , LIU Nian-Qing , ZHAO Yu-Liang , HUANG Yu-Ying . Spatial Distribution of Elements in the Brain of Rats Measured by Synchrotron Radiation X-ray Fluoresence. Chinese Physics C, 2005, 29(10): 1012-1016.
[3]	LIU Ying-Bin , GAO Yu-Xi , CHEN Chun-Ying , LI Bai , YU Hong-Wei , WANG Jiang-Xue , HE Wei , HUANG Yu-Ying , CHAI Zhi-Fang . Quantitative Analysis of Iron in Protein Bands Existing in Polyacrylamide Gel Matrix with Synchrotron Radiation. Chinese Physics C, 2005, 29(S1): 61-64.
[4]	SHEN Da-Wa , YU Hui , WU Zong-Hua , HUANG Yong . The Morphology of CDA-g-PMMA Copolymers in Solution Studied by SR-SAXS. Chinese Physics C, 2005, 29(S1): 8-11.
[5]	ZHANG Hui , WANG Bao-Yi , ZHANG Zhe , WANG Ping , WEI Long , JIA Quan-Jie , WANG Yu-Zhu . Experimental studies on FeS₂ films prepared on Si (100) substrates by synchrotron radiation surface X-ray diffraction method. Chinese Physics C, 2005, 29(S1): 32-36.
[6]	HAO Hu-Lin , FENG Ying , HUANG Yu-Ying , TIAN Sheng-Ke , LU Ling-Li , YANG Xiao-E , WEI You-Zhang . In Situ Analysis of Cellular Distribution of Iron and Zinc in Rice Grain Using SRXRF Method. Chinese Physics C, 2005, 29(S1): 56-60.
[7]	XU Qing , WEI Xiang-Jun , HUANG Yu-Ying , HE Wei . Grazing Exit X-Ray Fluorescence Spectroscopy. Chinese Physics C, 2005, 29(S1): 80-83.
[8]	ZHENG Lei , CUI Ming-Qi , ZHU Jie , ZHAO Yi-Dong . Determination of the Photoabsorption Cross-Sections of Al and Fe Films in the Soft X-Ray Region Using Synchrotron Radiation. Chinese Physics C, 2004, 28(10): 1121-1125.
[9]	YU Fu-Sheng , YUAN Wan-Ming , HAN Song , JIN Ke , HUANG Yu-Ying , HE Wei , DONG Jin-Quan , JIA Xiu-Qin , CAO Jie , WANG Hong-Yue . Measurements of Trace Elements in Melt Inclusions by Synchrotron Radiation X-Ray Fluorescence Microprobe Techniques. Chinese Physics C, 2004, 28(6): 675-678.
[10]	ZHU Jie , CUI Ming-Qi , ZHENG Lei , ZHAO Yi-Dong , WANG Zhan-Shan . Multilayer Polarizing Elements for Synchrotron Radiation Soft X-Ray Region. Chinese Physics C, 2004, 28(8): 893-897.
[11]	ZHANG Zhi-Yong , LIU Nian-Qing , LI Fu-Liang , HUANG Yu-Ying , HE Wei , Lei Hao , ZHOU Zhen-You . The Manganese Distribution in Olfactory Bulbs of Rat Measured by Synchrotron Radiation X-ray Fluorescence. Chinese Physics C, 2003, 27(S1): 114-117.
[12]	ZHOU Chun-Lan , WANG Dan-Ni , HE Chuang-Xin , WANG Bao-Yi , WEI Long , HE Qing , JIA Quan-Jie . Study on Pores and Defect by Synthrotron Radiation Small Angle Reflection Method and Slow Positron Annihilation Technique. Chinese Physics C, 2003, 27(S1): 67-71.
[13]	TANG Yun-Hui , YUAN Wan-Ming , HAN Chun-Ming , HUANG Yu-Ying , HE Wei . SRXRF analysis on muscovite in Yuerya gold deposit, Eastern Hebei, China. Chinese Physics C, 2003, 27(S1): 109-113.
[14]	KANG Shi-Xiu , SUN Xia , YAO Kun , WU Zi-Qin , HUANG Yu-Ying , JU Xin , XIAN Ding-Chang . Measurement and Calculation of Escape Peak in SR-XRF Analysis. Chinese Physics C, 2001, 25(S1): 39-43.
[15]	JU Xin , SHEN Xian-Sheng , KANG Shi-Xiu , WU Zi-Qin , SUN Li-Guang , ZHANG Li , YIN Xue-Bin , HUANG Yu-Ying . X-Ray Fluorescence Analysis of Some Plants in the King George Island,Antarctica. Chinese Physics C, 2001, 25(S1): 44-48.
[16]	Jiang Jianhua , Wang Zhouguang , Tian Yulian , Wang Gongli , Zhao Yang , Cao Mang , Li Dacheng , , . Study of X-Ray Interference Using Synchrotron Radiation. Chinese Physics C, 1998, 22(8): 763-767.
[17]	Wu Yingrong , Chao Zhiyu , Pan Juxiang , Hong Rong , Xiao Yanan , Li Guangcheng , Huang Yuying , Zhao Limin . Microprobe X-Ray Fluoresceoce Experintental Station of Beijing Syochrotron Radiation Facility. Chinese Physics C, 1997, 21(5): 475-480.
[18]	Jiang Haiyin , Wang Dewu , Liu Jianfei , Wu Zhonghua , Xie Yahing , Gu Mu , Chen Lingyan . Study of Fluorescent Decay Properties of Fluorides With Beijing Synchrotron Radiation Source. Chinese Physics C, 1996, 20(12): 1103-1109.
[19]	Jiang Xiaoming , Jing Yuhui , Zheng Wenli , Xiu Lisong , Wu Jinyang , Liu Gongchun . X-Ray Diffuse Scattering Station at BSRF and Study on Nonspecular X-Ray Scattering From Quasiperiodic Amorphous Multilayer. Chinese Physics C, 1996, 20(5): 460-467.
[20]	Wang Jun , Cui Mingqi , Xu Wenxuan , Huang Yuying , Wang Dewu , Liu Jianfei , Xian Dingchang . Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method. Chinese Physics C, 1994, 18(1): 13-19.

Access

Get Citation

GONG Yan, CHEN Bo, NI Qi-Liang, CUI Ming-Qi, ZHAO Yi-Dong and WU Zhong-Hua. Thickness Analysis for Thin-Film by Glazing Exit X-ray Fluorescence With Synchrotron Radiation Source[J]. Chinese Physics C, 2005, 29(11): 1104-1106.

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 2005-01-11
Revised: 1900-01-01

Article Metric

Article Views(3412)
PDF Downloads(589)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Thickness Analysis for Thin-Film by Glazing Exit X-ray Fluorescence With Synchrotron Radiation Source

Corresponding author: GONG Yan,

State Key Lab of Applied Optics,the Institute of Optics,Fine Mechanics and Physics,CAS,Changchun 130033,China2 Institute of High Energy Physics,CAS,Beijing 100049,China

Received Date: 2005-01-11

Accepted Date: 1900-01-01

Available Online: 2005-11-05

Abstract: The grazing exit X-ray fluorescence provides a possibility to analyze the characteristics of thin film and multilayer, especially the thickness, interface structure and composition.The Cr film samples with different thickness deposited on silicon (Si) bases are tested with grazing method using Beijing synchrotron radiation source (SR) as excitation light.The results agree with the theoretical prediction, and the interference of emitted X-ray has been observed.

HTML

Reference (1)

Thickness Analysis for Thin-Film by Glazing Exit X-ray Fluorescence With Synchrotron Radiation Source

Abstract：

References

Access

Article Metrics

Metrics

通讯作者: 陈斌, bchen63@163.com

Email This Article