ANALYSIS DEPTH PROFILING IN MATERALS BY ELASTIC RECOIL DETECTION

LIU Shi-Jie; WU Yue; SHENG Kang-Long; LI Chun-Ying

近期发现有不法分子冒充我刊与作者联系，借此进行欺诈等不法行为，请广大作者加以鉴别，如遇诈骗行为，请第一时间与我刊编辑部联系确认（《中国物理C》（英文）编辑部电话：010-88235947,010-88236950），并作报警处理。

本刊再次郑重声明：

（1）本刊官方网址为cpc.ihep.ac.cn和https://iopscience.iop.org/journal/1674-1137

（2）本刊采编系统作者中心是投稿的唯一路径，该系统为ScholarOne远程稿件采编系统，仅在本刊投稿网网址（https://mc03.manuscriptcentral.com/cpc）设有登录入口。本刊不接受其他方式的投稿，如打印稿投稿、E-mail信箱投稿等，若以此种方式接收投稿均为假冒。

（3）所有投稿均需经过严格的同行评议、编辑加工后方可发表，本刊不存在所谓的“编辑部内部征稿”。如果有人以“编辑部内部人员”名义帮助作者发稿，并收取发表费用，均为假冒。

《中国物理C》（英文）编辑部

2024年10月30日

Chinese Physics C> 1989, Vol. 13> Issue(6) : 481-486

ANALYSIS DEPTH PROFILING IN MATERALS BY ELASTIC RECOIL DETECTION

Institute of High Energy,Academia Sinica,Beijing2 Institute of Nuclear Research Academia Sinica,Shanghai3 North China Electro-Optics Research Institute,Beijing

Abstract
HTML
Reference
Related

PDF

Abstract：
The elastic recoil detection (ERD) by using a 2.0—2.5MeV ⁴He ,ion beam has been employed to detect the depth profiling of hydrogen in the Silicon oxide and silicon nitride films.The correlation between the hydrogen content and the deposition condition is given.Maximum probing depth,detection limit and depth resolution are discussed under our experiment conditions.

References

[1]

W.A. Lanford et al., Appl. Phys. Lett., 28(1976). 566.[2] D. A. Leich T. A. Tombrello, Nucl. Instr. and Meth., 108(1973), 67.[3] J . L'Ecuyer et al., J . Appl. Phys., 47(1976), 881.[4] Cheng Huan-sheng et al., Nucl. Instr. and Meth., 218(1983), 601.[5] Ching-yea Wei, IEEE Trsnsaction on Electron Devices ED-27(1980), 170.[6] A. Turos and O. Meyer, Nucl. Instr. and Meth., 232 B4(1984),92 .[7] J. W. Mayer et al., Ion Beam Handbook (Academic Press, New York, 1977).[8] F. Paszti et al., Nrcl. Instr and meth., B15(1986), 486.

[1]	PING Rong-Gang , MO Xiao-Hu , DU Shu-Xian , LIU Jing , MA Lian-Liang , SHEN Cheng-Ping , WANG Zhi-Yong , YUAN Chang-Zheng . Extract Signals by Fitting χ² Distribution of the Kinematic Fit. Chinese Physics C, 2007, 31(3): 229-231.
[2]	HUANG Gui-Rong . Admittance Equivalence of Beam-Cavity Interaction. Chinese Physics C, 2006, 30(7): 684-687.
[3]	WANG Feng-Mei , HENG Yue-Kun , YANG Lei , WU Chong , ZHAO Xiao-Jian , SUN Zhi-Jia , WU Jin-Jie , ZHAO Li , ZHAO Yu-Da , JIANG Lin-Li . Effect of Scintillator Wrapping Materials on Performance of TOF Counter. Chinese Physics C, 2006, 30(8): 776-779.
[4]	XU Qing , WEI Xiang-Jun , HUANG Yu-Ying , HE Wei . Grazing Exit X-Ray Fluorescence Spectroscopy. Chinese Physics C, 2005, 29(S1): 80-83.
[5]	JIN Yun-Fan , WANG Zhi-Guang . Ion Velocity Effect in the Process of the Damage Creation in Solid Materials Induced by Swift Heavy Ion Irradiations. Chinese Physics C, 2005, 29(11): 1115-1120.
[6]	ZHANG Ming-Long , XIA Yi-Ben , WANG Lin-Jun , ZHANG Wei-Li . A Suitable Material for the Substrate of Micro-Strip Gas Chamber. Chinese Physics C, 2004, 28(4): 408-411.
[7]	LU Zhao-Hui , WU He-Yu , HU Rong-Jiang , ZHU Yong-Tai , ZHANG Bao-Guo , LI Zu-Yu , WEI Zhi-Yong , DUAN Li-Min , WANG Hong-Wei , XIAO Zhi-Gang , WANG Su-Fang , JIN Gen-Ming , GUO Zh , , , . Angular Distribution of Elastic Scattering of ¹⁷F and ¹⁸Ne on Proton. Chinese Physics C, 2002, 26(6): 594-599.
[8]	LI Cheng-Bo , YUAN Jian , LIN Er-Kang , ZHANG Pei-Hua , MENG Qiu-Ying . Monte-Carlo Simulation and Analysis of the Spectrum of p+¹¹B Three-Body Sequential Decay. Chinese Physics C, 2002, 26(12): 1223-1227.
[9]	YAN WenBiao , YANG ChunBin , CAI Xu . A Poissible Method to Determine the Order of QGP Phase Transitions. Chinese Physics C, 2000, 24(9): 852-857.
[10]	Ruan Jinghui , Niu Shiwen , Zeng Xiangxin , Wang Jun , Cheng Zhixu , Cheng Yufen , Gou Cheng , Guo Liping , Lin Jun , Yu Ansun , Shen Zhigong , Ke Yongfeng , Zhang Panlin , Yan Qiwei . A Beryllium Filter Spectrometer With High Efficiency for Neutron Inelastic Scattering. Chinese Physics C, 1996, 20(6): 498-504.
[11]	An Zhu . Microscopic Analysis of Proton Scattering from ²⁸Si at 22MeV. Chinese Physics C, 1995, 19(10): 873-878.
[12]	ZHAO Xuan , ZENG Fan-An , LING You-Guang . A FURTHER STUDY OF QUASI RESONATING GROUP METHOD—— ANALYSIS OF p+⁶Li ELASTIC SCATTERING. Chinese Physics C, 1990, 14(1): 85-91.
[13]	XU Jian-Ming , WU Qing . STUDIES OF THE FIELD DISTRIBUTION OF THE MODULATING WIDTH MULTIPOLE PERMANENT MAGNETS. Chinese Physics C, 1987, 11(3): 369-375.
[14]	LI Yang-Guo , LIU Yuan , ZHANG Yu-Shun . GLAUBER'S METHOD AND NUCLEUS-NUCLEUS INELASTIC SCATTERING AT HIGH ENERGY. Chinese Physics C, 1986, 10(2): 198-206.
[15]	KONG Ling-Jiang , KONG Fan-Xin , LIU Xian-Hui . ELASTIC SCATTERING OF K± MESONS BY ^40—48Ca AND THE ANALYSIS OF NEUTRON DISTRIBUTIONS. Chinese Physics C, 1985, 9(1): 46-54.
[16]	MAO Zhen-Lin . THE R-FUNCTION METHOD FOR RADIATIVE CORRECTIONS TO THE ELECTRON INELASTIC SCATTERING. Chinese Physics C, 1984, 8(4): 401-408.
[17]	ZHONG Ji-Quan , GE Ling-Xiao , LIU Jian-Ye , YU Xian . A DYNAMICAL METHOD IN DEEP IN ELASTIC COLLISION OF HEAVY IONS. Chinese Physics C, 1983, 7(5): 598-604.
[18]	SHEN Wen-Qing . A METHOD OF DATA ANALYSIS OF THE MAGNETIC SPECTROMETER. Chinese Physics C, 1983, 7(3): 361-369.
[19]	ZHANG Gui-Shan , ZHANG Huan-Qiao . MONTE CARLO CALCULATION OF THE EFFICIENCIES OF THE LEAD GLASS DETECTORS FOR HIGH-ENERGY GAMMA RAYS. Chinese Physics C, 1983, 7(3): 370-378.
[20]	LIU BO , CHIANG HUAN-CHING . THE DWIA ANALYSIS OF PION-¹⁸O INELASTIC SCATTERING. Chinese Physics C, 1982, 6(6): 743-749.

Access

Get Citation

LIU Shi-Jie, WU Yue, SHENG Kang-Long and LI Chun-Ying. ANALYSIS DEPTH PROFILING IN MATERALS BY ELASTIC RECOIL DETECTION[J]. Chinese Physics C, 1989, 13(6): 481-486.

LIU Shi-Jie, WU Yue, SHENG Kang-Long and LI Chun-Ying. ANALYSIS DEPTH PROFILING IN MATERALS BY ELASTIC RECOIL DETECTION[J]. Chinese Physics C, 1989, 13(6): 481-486. shu

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 1900-01-01
Revised: 1900-01-01

Article Metric

Article Views(2563)
PDF Downloads(399)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

ANALYSIS DEPTH PROFILING IN MATERALS BY ELASTIC RECOIL DETECTION

Corresponding author: LIU Shi-Jie,

Institute of High Energy,Academia Sinica,Beijing2 Institute of Nuclear Research Academia Sinica,Shanghai3 North China Electro-Optics Research Institute,Beijing

Received Date: 1900-01-01
Accepted Date: 1900-01-01
Available Online: 1989-06-05

Abstract: The elastic recoil detection (ERD) by using a 2.0—2.5MeV ⁴He ,ion beam has been employed to detect the depth profiling of hydrogen in the Silicon oxide and silicon nitride films.The correlation between the hydrogen content and the deposition condition is given.Maximum probing depth,detection limit and depth resolution are discussed under our experiment conditions.