• [1]

    O' Sullivan B J, Hurley P K, Leveugle C et al. J. Appl. Phys., 2001, 89(7): 38112 Santucci S, Guerrieri S, Passacantando M et al. J. Non-Crys. Solids, 2001, 280: 543 Briantseve T A, Lebedeva Z M, Lioubtchenko D V et al. Appl. Surf. Sci., 2000, 156: 214 Nobili D, Armigliato A, Finetti M, Solmi S. J. Appl. Phys., 1982, 53(3): 14845 Tamura M M. Mater. Sci. Rep., 1991, 6: 1416 Schreutelkamp R J, Custer J S, Liefting J R, LU W X, Saris F W. Mater. Sci. Rep., 1991, 6: 2757 Kim Y, Massoud H Z, Fair R. J. Electron. Mater., 1989, 18: 1438 Sands T, Washburn J, Myers E, Sadana D K. Nucl. In-strum. Methods B, 1985, 7: 3379 Seidel T E, Lischner D J, Pai C S, Knoell R V, Maher D M, Jacobson D C. Nucl. Instrum. Methods B, 1985, 7: 25110 Ajmera A C, Rozgonyi G A, Fair R B. Appl. Phys. Lett. J., 1988, 2: 813